The SKY® CDG100D is a heated capacitance diaphragm gauge for high-precision total pressure measurement and control. Temperature regulation at 100 °C gives the sensor outstanding signal stability and repeatability, independent of ambient conditions and process heat. The gas-type independent ceramic measuring cell is corrosion-resistant and protected by INFICON's patented sensor shield, and the gauge delivers a linear 0–10 V output across full-scale ranges from 0.1 … 1000 Torr / 0.13 … 1333 mbar, with all common flange types and fieldbus interfaces available.
- Etch, CVD, PVD and other semiconductor processes
- Chemical and corrosive vacuum processes
- General thin-film and vacuum processes
- Reference sensor and transfer standards
- Sensor temperature-controlled at 100 °C
- Accuracy 0.2 % of reading (0.4 % lowest range)
- Gas-type independent, corrosion-resistant ceramic cell
- Patented sensor contamination shield
- 50 % faster warm-up — lower cost of ownership
- One-button or remote zero adjustment
- Diagnostic port for fast service
- No long-term recalibration required; 2-year warranty
- CE, EN, UL, SEMI, RoHS
| Sensor temperature | 100 °C |
| Full-scale ranges | 0.1 … 1000 Torr / 0.13 … 1333 mbar |
| Accuracy | 0.2 % of reading (0.4 % lowest range) |
| Response time | 30 ms |
| Output / interfaces | 0–10 V · DeviceNet · Profibus DP · Profinet · 4–20 mA · EtherCAT |
| Supply voltage | +14 … +30 V DC / ±15 V |
| Conformity | CE, EN, UL, SEMI, RoHS |