The INFICON PGE500 is the high-performance version of the Enhanced Pirani gauge with OLED display and digital filament control.
Key Features
- Measurement range: 5×10⁻⁴ to 1000 mbar (gas-type dependent)
- OLED display for excellent readability
- 2 programmable setpoint relays
- D-Sub 9-pin analog output (0–10 V)
- Optional DeviceNet™ fieldbus interface
- Direct drop-in replacement for most Granville-Phillips® Mini-Convectron® modules
- Available in 8 process connections: ISO-KF, CF-R, VCR, NPT
Applications
- Semiconductor process equipment
- Industrial vacuum systems requiring fieldbus integration
- General vacuum measurement and control
