The INFICON SKY® CDG100D is a 100°C temperature-controlled capacitance diaphragm gauge for high-temperature processes in semiconductor and plasma manufacturing.
Technical Specifications
| Temperature Control | 100 °C |
| Measurement Range | 100 mTorr … 1000 Torr / 0,13 mbar … 1100 mbar |
| Accuracy | 0,2 % (1000–200 Torr) / 0,4 % (0,5–0,1 Torr) des Messwerts |
| Resolution | 0,003 % des Endwerts |
| Output Signal | 0 … +10 V DC |
| Response Time | 30–130 ms |
| Sensor Material | Aluminiumoxid (Al₂O₃), Edelstahl 316L |
| Interfaces | Analog, EtherCAT, Profinet, Profibus DP |
| Certifications | CE, EN, UL, SEMI, RoHS |
Technical data may vary depending on configuration.