Référence interne:
550-200
ULTRATEST UL3000 Fab — Teknik Özellikler
| Hassasiyet | ≤1×10⁻¹¹ mbar·l/s |
| Pompa | Turbo moleküler pompa (kuru pompa opsiyonu) |
| Modeller | UL3000 Fab, UL3000 Fab ULTRA (kuru pompa) |
| Sertifikalar | CE, SEMI S2 |
ULTRATEST UL3000 Fab — Technische Daten
| Empfindlichkeit | ≤1×10⁻¹¹ mbar·l/s |
| Pumpe | Turbomolekularpumpe (Trockenpumpe Option) |
| Modelle | UL3000 Fab, UL3000 Fab ULTRA |
| Zertifizierungen | CE, SEMI S2 |
ULTRATEST UL3000 Fab — Technical Specifications
| Sensitivity | ≤1×10⁻¹¹ mbar·l/s |
| Pump | Turbomolecular pump (dry pump option) |
| Models | UL3000 Fab, UL3000 Fab ULTRA |
| Certifications | CE, SEMI S2 |
ULTRATEST UL3000 Fab — Caractéristiques
| Sensibilité | ≤1×10⁻¹¹ mbar·l/s |
| Certifications | CE, SEMI S2 |
ULTRATEST UL3000 Fab — المواصفات
| الحساسية | ≤1×10⁻¹¹ mbar·l/s |
| الشهادات | CE, SEMI S2 |