The INFICON PSG550/552/554 is an advanced digital Pirani gauge with rugged sensor design covering 5×10⁻⁵ Torr to 1000 Torr.
Key Features
- Three sensor options: Tungsten (PSG550), Nickel (PSG552), Ceramic-coated (PSG554)
- Optional display, setpoints and digital interfaces
- EtherCAT® protocol (ETG.5003.2080)
- Plug-and-play sensor element with on-board calibration data
- Selectable output signal, multiple plug versions
- Any mounting orientation
- Diagnostic port on all versions
- CE, EN, UL, CSA, RoHS
Applications
- Fore vacuum pressure measurement
- Safety circuits in vacuum systems
- General vacuum measurement and control
- Inert gas operations