The INFICON PPG550/PPG570 combines state-of-the-art MEMS piezo technology with a Pirani sensor for precise measurements across the entire vacuum range in a single flange.
Key Features
- State-of-the-art MEMS piezo sensor + Pirani technology
- Gas-type independent above 2 mbar — safe venting
- High accuracy and reproducibility at atmospheric pressure
- Selectable analog output signal for easy system integration
- Digital interfaces: RS-232 and RS-485
- Direct replacement for MKS 910 and MKS 925
- Enhanced vibration resistance
- PPG550 and PPG570 (extended range) available
Applications
- Analytical instruments and mass spectrometers
- Physical vapor deposition (PVD)
- Fore vacuum measurement
- Gas backfilling operations
